T. Vonwoedtke et al., SUBPICOSECOND-PULSE LASER MICROSTRUCTURING FOR ENHANCED REPRODUCIBILITY OF BIOSENSORS, Sensors and actuators. B, Chemical, 42(3), 1997, pp. 151-156
Curved substrates can be micro-structured by laser ablation, which is
not possible with standard lithographic methods. The novel femtosecond
-pulse laser technique allows the :production of defined and reproduci
ble micro-perforations of originally analyte-impermeable membranes. Th
e trans-membrane analyte flux can be controlled both by the variation
of the laser focus diameter resulting in different areas of single per
forations, and the number of perforations in arrays on small membrane
areas. This leads to a higher degree of variability as well as reprodu
cibility of the diffusion qualities of sensor membranes, and marks the
main innovation with this technique compared to the hand-made mechani
cal perforation by specially grinded needles used up to now. Touchless
micro-perforation of small membrane areas with negligible heat damage
of the structures adjacent to the perforation allows the application
of 'analyte door' membranes directly onto curved surfaces of miniaturi
zed needle-sensors assigned for in vivo glucose monitoring, for the fi
rst time. (C) 1997 Elsevier Science S.A.