WAVE-GUIDE RAMAN MICROSPECTROSCOPY USED FOR LOCAL INVESTIGATION OF VERY THIN-FILMS

This paper presents a new Raman tool for local investigations of very thin waveguiding films, This method, called waveguide Raman microspect roscopy (WRMS), combines the advantages of micro-Raman spectroscopy (M RS) and waveguide Raman spectroscopy (WRS), Experiments were carried o ut on a thin TiO2 waveguide (150 nm thick) obtained by the sol-gel pro cess. Results obtained on the TiO2 thin waveguide confirm the interest in this non-destructive method, including simultaneous optical observ ations of the layer, local investigations, microstructural analyses an d very low-wavenumber Raman scattering investigations, Further applica tions of WRMS are described. (C) 1997 John Wiley & Sons, Ltd.