La2-xSrxCuO4 ultra-thin films with thickness 200 Angstrom were fabrica
ted by pulsed laser deposition method in oxygen (O-2) atmosphere. The
morphology of deposited films was investigated by reflection high ener
gy electron diffraction (RHEED), atomic force microscopy (AFM) and sca
nning electronic microscopy (SEM). The strong oxygen ambient pressure
dependence of film morphology was observed. In high oxygen ambient pre
ssure, the film growth is dominated by island growth mode. The results
imply that the experimental conditions of oxygen ambient pressure and
substrate temperature are critical for the layer-by-layer growth mode
.