A high-resolution distance meter is fabricated using optical waveguide
modulators. The modulation frequencies of the optical modulators are
around 3.5 GHz, while the modulation frequencies of the optical intens
ity are around 7 GHz because the modulation bias voltages are set at t
he peaks of the electrooptic characteristics. The distance meter was e
valuated in the National Research Laboratory of Metrology (NRLM) tunne
l, which is a semiunderground tunnel, The measurement resolution has a
standard deviation of 12 mu m for a distance range of 0.5 to 5 m afte
r correction of the cyclic error. (C) 1997 Society of Photo-Optical in
strumentation Engineers.