OPTICAL SEMICONDUCTOR-DEVICES FOR HYBRID MODULES

Optical module cost can be greatly reduced by using two innovative new devices: spot-size converter integrated lasers, where a lens function is integrated directly onto the laser, and waveguide photodiodes, in which the light propagates in a direction that is coplanar with planar lightwave circuits. To reduce the chip cost of these key devices, thi s paper introduces a technique for producing lasers with high uniformi ty on 2-inch wafers, a spot-size converter integration technique, and a planar waveguide photodiode technology. The results of device perfor mance and reliability tests are also discussed.