The results of neutron-diffraction experiments performed on two sample
s of amorphous CNx, with nitrogen concentrations of 5 and 30 at. %, pr
epared by a combination of filtered cathodic are and Kaufman-type ion
source, are presented. Increasing the N content of the samples is seen
to cause a decrease of the average bond length and the first coordina
tion number. An increase in the average bond angle from 113 degrees to
121 degrees is also observed. The pair-distribution functions indicat
e that N incorporation results in some transformation of sp(3) C sites
to sp(2) sites, but there is no evidence for N inducing the formation
of crystalline graphitic clusters, and the overall structure remains
amorphous. A direct subtraction of the two data sets emphasizes the lo
ss of sp(3) bonds and the increasing sp(2) character of the higher-N-c
ontent sample, and shows the occurrence of a variety of bonding enviro
nments for N. More limited information on second neighbor correlations
involving N is also revealed.