3-PHASE PIEZOINERTIA MOTOR FOR A LOW-TEMPERATURE SCANNING TUNNELING MICROSCOPE

Citation
Ap. Volodin et Am. Troyanovskii, 3-PHASE PIEZOINERTIA MOTOR FOR A LOW-TEMPERATURE SCANNING TUNNELING MICROSCOPE, Instruments and experimental techniques, 40(5), 1997, pp. 724-726
Citations number
7
ISSN journal
00204412
Volume
40
Issue
5
Year of publication
1997
Pages
724 - 726
Database
ISI
SICI code
0020-4412(1997)40:5<724:3PMFAL>2.0.ZU;2-S
Abstract
A three-phase piezoinertia stepper motor Cor approaching the tip to a sample in a scanning tunneling microscope operating in a large tempera ture range (from room to helium temperatures) is described. The motor dimensions are 12 (diameter) x 15 mn, the minimal operating voltages a t room and helium temperatures 4.2 K are 70 and 180 V, respectively, a nd the minimal displacement step is 10 nm.