Ap. Volodin et Am. Troyanovskii, 3-PHASE PIEZOINERTIA MOTOR FOR A LOW-TEMPERATURE SCANNING TUNNELING MICROSCOPE, Instruments and experimental techniques, 40(5), 1997, pp. 724-726
A three-phase piezoinertia stepper motor Cor approaching the tip to a
sample in a scanning tunneling microscope operating in a large tempera
ture range (from room to helium temperatures) is described. The motor
dimensions are 12 (diameter) x 15 mn, the minimal operating voltages a
t room and helium temperatures 4.2 K are 70 and 180 V, respectively, a
nd the minimal displacement step is 10 nm.