A HIGH-CURRENT ION ACCELERATOR FOR SHORT-PULSE ION-IMPLANTATION

A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm(2), an energy of 30-150 kV/n (n is the ion charge ), a beam cross-section area of 180 cm(2), and a pulse repetition freq uency of up to 10 Hz, is described. The accelerator comprises a high-v oltage (300 kV) pulse transformer, a nanosecond generator using low-oh mic cables capable of producing two voltage pulses of arbitrary polari ty, and a magnetically insulated diode. The first nanosecond voltage p ulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the ac celerator is illustrated by data on the production of hydrogen, carbon , and aluminum ion beams.