NANOMETER ANALYSIS OF CONTACT LACUNAE IN SILICON COMPONENT TECHNOLOGY

Authors
CERVA H RUCKI A KLUPPEL V FUSKA T
Citation
H. Cerva et al., NANOMETER ANALYSIS OF CONTACT LACUNAE IN SILICON COMPONENT TECHNOLOGY, European journal of cell biology, 74, 1997, pp. 58-58
Citations number
NO
Categorie Soggetti
Cell Biology
Journal title
European journal of cell biology → ACNP
ISSN journal
01719335
Volume
74
Year of publication
1997
Supplement
45
Pages
58 - 58
Database
ISI
SICI code
0171-9335(1997)74:<58:NAOCLI>2.0.ZU;2-8