Investigations of highly efficient grating couplers for polymer slab a
nd strip waveguides fabricated by electron-beam lithography are report
ed. A maximum input efficiency of 67% is achieved. The electron-beam d
irect-writing technique allows one to replicate the original gratings
into polymer substrates by embossing. An all-polymeric optical chip wi
th efficient grating couplers is demonstrated. Waveguide grating coupl
ers with blazed profile and variable grating depth are investigated. T
hus, the intensity distribution of the outcoupled light is matched to
a Gaussian-like profile. A focusing blazed grating that couples the li
ght with an efficiency of 42% into a polymer strip waveguide is report
ed. A curvature correction of the grating lines allows one to improve
the focusing properties. (C) 1997 Optical Society of America.