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It is well known that over the last 15 years process and device simula tion has established itself as an indispensable accelerating toolfov t he raid development of micorelectronics. Its practical aim is to provi de microelectronics engineers with the computer simulation tools which form quantitative links between the basic technological parameters an d electrical behaviour of microelectronics devices. That allows one to test, evaluate and optimize various aspects of the microelectronics i ndustry development cycles without resorting to expensive and time-con suming fabrication prototypes. However, despite the consistently remar kable achievements in this area, evolution towards ever smaller device s, advanced processes and new materials continuously necessitates the development of new physical modesl, numerical techniques and simulatio n programs.