TECHNOLOGY CAD AT AT-AND-T

Technology computer-aided design (TCAD) is essential to the design of modem integrated circuit fabrication processes. TCAD tools must not on ly model real processes accurately, to allow predictive simulation dur ing technology research and development, but they must work together a s an integrated system to allow efficient exploration of technology op tions. Sensitivity and statistical analyses using an integrated TCAD s ystem provide rapid technology characterization, including the examina tion of process extremes, before fabrication. This predictive capabili ty reduces the technology design interval, and enables the design of o ptimized, manufacturable designs. This paper describes the integrated TCAD system in use at AT & T.