THE STORM TECHNOLOGY CAD-SYSTEM

This paper gives an outline of the STORM TCAD system. STORM is a progr am system for the two-dimensional simulation of semiconductor fabricat ion process sequences and the optimization of the electrical behaviour of the devices fabricated. It has been developed within an ESPRIT pro ject by a consortium of European companies and research institutes. In this presentation, the software structure of STORM is described, foll owed by a discussion of the physical models developed. Finally, some a pplication examples are given. A more detailed description of the indu strial evaluation of STORM is given in a dedicated paper elsewhere [1] .