The MASTER Framework has a two-level architecture. The first level con
sists of a standard structure format and a set of MASTER Tools'. This
provides a high quality, utility-based framework that supports highly
interactive use. The second level is a 'Virtual Wafer Fab' that adds c
apabilities for large-scale simulation-based design and experimentatio
n. Powerful semiconductor technology CAD systems are constructed by po
pulating the MASTER Framework with conforming process and device simul
ators.