In this paper, we present a simple but accurate engineering tool for o
ptimizing the lifetime of MOSFETs against hot carrier degradation. The
method consists of simulation of the substrate currents in conjunctio
n with the use of an empirical relation between the transistor lifetim
e and the MOSFET currents. Accurate calculations of the substrate curr
ents are only possible if depth-dependent impact ionization is used in
combination with the energy-balance equation.