DESIGN AND FABRICATION TECHNOLOGY OF THINNED BACKSIDE-EXCITED CCD IMAGERS AND THE FAMILY OF THE ELECTRON-BOMBARDED CCD IMAGE TUBES

Authors
DALINENKO I KOSSOV V KOZLOV V LAZOVSKY L MALYAROV A VISHNEVSKY G VYDREVITCH M ZHUK A GOLOVKIN S
Citation
I. Dalinenko et al., DESIGN AND FABRICATION TECHNOLOGY OF THINNED BACKSIDE-EXCITED CCD IMAGERS AND THE FAMILY OF THE ELECTRON-BOMBARDED CCD IMAGE TUBES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 387(1-2), 1997, pp. 294-296
Citations number
6
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
387
Issue
1-2
Year of publication
1997
Pages
294 - 296
Database
ISI
SICI code
0168-9002(1997)387:1-2<294:DAFTOT>2.0.ZU;2-Q
Abstract
The results of more than 10 years experience in design and manufacturi ng of thinned backside illuminated CCDs of different types are summed up. Based upon the EB CCDs created, the family of intensified electron -bombarded CCD image tubes has been designed, fabricated and tested. T his family includes: the single-stage Gen I type EB CCD devices with t he 532 X 580 and 780 x 580 pixels CCDs; the ''hybrid'' (the EB CCD tub e plus Gen I image intensifier) devices; and the EB CCD tubes with the 40 mm photocathode and image demagnification factor 3:1. The results of tests of these devices are presented and discussed. Besides, the ne ar future projects concerning EB CCD tubes with 80 mm photocathode and with image demagnification factor 5:1, the EB CCD tubes with solar bl ind photocathodes for the UV and EUV applications are briefly describe d.