CHARACTERIZATION OF FILTERED CATHODIC VACUUM-ARC SYSTEM

Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum are (FCVA) techn ique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and are current on the ion energy were investigated. The ion energy distribution at the exit of the duc t was measured by a Faraday cup. Plasma floating potential and saturat ion current were also determined by langmuir and current probes, respe ctively. The experimental results were found to be in good agreement w ith the simulations results based on an improved drift approximation m odel. (C) 1997 Elsevier Science S.A.