PVD COATING OF 3D PARTS STUDIED WITH MODEL SAMPLES

TiN coatings are deposited by reactive magnetron sputtering, cathodic are evaporation and hollow cathode discharge are evaporation on high s peed steel samples representing different 3D profiles. The thickness, morphology and hardness distribution on the model samples are determin ed for a double magnetron, an unbalanced magnetron, a hollow cathode d ischarge and a cathodic are evaporation laboratory arrangement, and an industrial two-source cathodic are deposition system. The properties depend strongly on the deposition technique, the angle of incidence, t he deposition conditions (with and without sample movement) and the pr ofile depth of the groove and wedge samples. (C) 1997 Elsevier Science S.A.