VACUUM-ARC EVAPORATION WITH PROGRAMMABLE EROSION AND DEPOSITION PROFILE

An advanced vacuum dc-arc evaporation unit, consisting of a broad area flat cathode and a computer controlled array of magnetic coils, is de scribed, It is shown that such a magnetic amy can control the erosion area within well defined pattern. The system is useful for increasing the cathode-lifetime due to prevention of inhomogeneous erosion, Moreo ver, the programable are evaporation unit can be used to solve special deposition problems, for example deposition with a predefined thickne ss profile. On the other hand it can be used to increase the area of h omogeneous deposition. The system was tested on industrial deposition plants and is now available. (C) 1997 Elsevier Science S.A.