ELECTRON THERMAL EFFECTS AND NEW TECHNIQUES OF MICROBEAM ANALYSIS IN SEM

Electron thermoacoustic effect, electron thermoradiometry effect and t he principles of imaging in SEM are described and discussed. A new tec hnique of scanning electron thermoradiometry (SETR) and a new combined use of the technique of SETR and scanning electron thermoacoustic (SE TA) microscopy are proposed. The energy distribution of SETR and SETA signals are analyzed.