NANOROUGHNESS EFFECT ON CR GROWTH-MECHANISM

A semiquantitative model is proposed to explain a nanoroughness effect on the Cr growth mechanism. It is shown that nanoroughness is another important factor that affects the Cr texture formation and Cr grain s ize besides temperature. By properly controlling the nanoroughness of the seed layer, a Cr(200) texture can be induced at low temperature an d a small Cr grain size with uniform distribution can be obtained. (C) 1997 American Institute of Physics.