ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM

The fabrication and characterization of a microfabricated acoustic Lam b-wave device driven by a piezoelectric PZT (modified lead zirconate t itanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport , mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz a re generated and detected in a thin acoustic composite membrane by usi ng two interdigitated transducers (IDTs) patterned on a 0.75 mu m thic k piezoelectric ceramic PZT film, which provides high acoustic power f or physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.