ELECTROMAGNETIC-FIELD STRUCTURE IN A WEAKLY COLLISIONAL INDUCTIVELY-COUPLED PLASMA

Two-dimensional, phase resolved magnetic probe measurements have been performed in a low pressure inductively coupled cylindrical plasma sou rce driven with a planar coil. The rf electric field and current densi ty distributions determined from these measurements exhibit an abnorma l nonmonotonic spatial evolution. Formation of a second current layer, phase bifurcation and a reversal of the rf field phase velocity have been found and are attributed to spatial dispersion of the plasma cond uctivity due to collisionless electron thermal motion typical of anoma lous skin effect. (C) 1997 American Institute of Physics.