Photoluminescence (PL) and spectroscopic ellipsometry measurements on
CdTe/Si strained heterostructures grown by molecular beam epitaxy were
carried out to investigate the effect of the strain and the dependenc
e of the strain on the Si tilted substrates. The results of the PL spe
ctra showed that the relative intensity ratio between the peak at 1.45
2 eV and the bound-exciton peak for the CdTe epilayer grown on the Si
(100) 1 degrees tilted substrate had a minimum value and that the stra
in for the CdTe epilayer grown on the Si (100) 8 degrees tilted substr
ate had a minimum value. When rapid thermal annealing (RTA) was perfor
med at 55 degrees C, the PL spectra showed that the relative intensity
ratio between the peak at 1.452 eV and that at 1.574 eV for the CdTe
epilayer grown on the Si (100) 8 degrees tilted substrate had a minimu
m value and that the strain for the CdTe epilayer grown on the Si (100
) 1 degrees tilted substrate had a minimum value. Spectroscopic ellips
ometry measurements showed that the spectrum of the dielectric constan
t of the CdTe epilayer grown on the Si (100) 8 degrees tilted substrat
e is similar to that of the CdTe bulk. These results indicate that the
strains in the CdTe layers grown on Si substrates are strongly depend
ent on the Si substrate orientation and that the crystallinity of the
CdTe epitaxial layer grown on the Si substrate is remarkably improved
by RTA. (C) 1997 American Institute of Physics.