Submicrometer-sized slotline and coplanar waveguide devices were used
for ferromagnetic resonance (FMR) measurement on submicrometer-sized m
agnetic fine particles. FMR measurements were taken on individual magn
etic disks, having diameters ranging from 50 to 1 mu m, using either a
slotline-coplanar waveguide (CPW) junction device or a coplanar waveg
uide transmission line junction device. The magnetic samples were etch
ed from a 105 nm thick amorphous Fe80B15Si5 film on a quartz substrate
. Absorption modes, which were measured with the submicrometer-sized s
lotline CPW, followed the Kittel magnetic resonance model for frequenc
ies from 1 to 20 GHz for the 1 mu m diam disk. By detecting the second
harmonic of the lock-in amplifier's reference signal, we have measure
d disk samples as small as 1 mu m in diameter. We estimated that the s
ensitivity is of the order of 3 x 10(9) spins, almost four orders of m
agnitude better than the sensitivity of a standard electron paramagnet
ic resonance system. (C) 1997 American Institute of Physics.