For more than thirty years, the capability of the integrated circuit (
IC)-whether it is memory size, processor speed, or cost per transistor
-has increased at an exponential rate. This capability increase was ac
hieved through a steady stream of technical innovations in physical sc
iences, design techniques, and manufacturing methods. However, serious
challenges to continued scaling, such as the limits of optical lithog
raphy and the complexity of wiring, loom on the horizon. This paper ex
plores the direction in which IC technology is headed, highlights pote
ntial roadblocks and possible solutions, and discusses some of the phy
sical considerations that could determine the ultimate limits of integ
ration.