EFFECTS OF LAMINATION ON SOFT-MAGNETIC PROPERTIES OF FEN FILMS ON SLOPING SURFACES

We have found that the soft magnetic properties of FeN/AlN laminated f ilms do not degrade on sloping surfaces. The easy axis coercivities of FeN/AlN multilayer films are approximately 1.5 Oe and have little var iation with slope angle, alpha. The anisotropy fields slightly vary fr om 13 to 17 Oe when the slope angles (alpha) change from 0 degrees to 60 degrees. In contrast, single layer FeN films show a significant deg radation of soft magnetic properties with the slope angle. Residual st ress does not have a significant correlation with magnetic properties. The large coercivities and saturation fields in the single layer FeN films can be ascribed to a change in the (110) texture of the films. ( C) 1997 American Institute of Physics.