DOPANT SPATIAL DISTRIBUTIONS - SAMPLE-INDEPENDENT RESPONSE FUNCTION AND MAXIMUM-ENTROPY RECONSTRUCTION

We demonstrate the use of maximum entropy based deconvolution to recon struct boron spatial distribution from the secondary ion mass spectrom etry (SIMS) depth profiles on a system of variously spaced boron delta layers grown in silicon. sample-independent response functions are ob tained using a new method that reduces the danger of incorporating rea l sample behavior in the response. Although the original profiles of d ifferent primary ion energies appear quite differently, the reconstruc ted distributions agree well with each other. The depth resolution in the reconstructed data is increased significantly and segregation of b oron at the near surface side of the delta layers is clearly shown.