P-LVV AND LMM AUGER EMISSION INDUCED BY AR+ IMPACT ON THE INP(110) SURFACE

The ion-stimulated Auger electron emission from P atoms was used to st udy collisional processes and core excitation in InP following bombard ment with 1-10 keV Ar+ in oblique incidence. Both the line shape and t he yield of the P LVV, bulklike emission and of the P LMM, atomiclike emission were investigated. It has been found that core excitations ma inly originate in asymmetric collisions at all bombarding energies abo ve threshold. The dependence of the sputtering yield on the ion incide nce angle has been found to contribute significantly to the angular di stribution of the P LMM partial yield.