SILICON THIN-FILM SENSOR FOR MEASUREMENT OF DISSOLVED-OXYGEN

A Clark-type oxygen sensor based on a silicon thin film transducer was constructed. The transducer was first electrochemically characterized by cyclic voltammetry and amperometry. Onto the chip a micromachined wafer is attached to form a compartment for the internal electrolyte, which is covered by a gas permeable membrane. In contrast to other min iaturized sensors a microelectrode array was used as cathode showing t he typical advantageous microelectrode properties and allowing to meas ure in both stirred and unstirred solutions, Two different electrode s pacings were processed, followed by an investigation of the electroche mical properties, The oxygen sensors were characterized regarding cali bration, long ten stability and response. (C) 1997 Elsevier Science S. A.