THEORY AND EXPERIMENTS ON R.F. SPUTTERED TIN OXIDE THIN-FILMS FOR GAS-SENSING APPLICATIONS

Authors
TANG ZN JIANG GP CHAN PCH SIN JKO LAU SS
Citation
Zn. Tang et al., THEORY AND EXPERIMENTS ON R.F. SPUTTERED TIN OXIDE THIN-FILMS FOR GAS-SENSING APPLICATIONS, Sensors and actuators. B, Chemical, 43(1-3), 1997, pp. 161-164
Citations number
7
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
43
Issue
1-3
Year of publication
1997
Pages
161 - 164
Database
ISI
SICI code
0925-4005(1997)43:1-3<161:TAEORS>2.0.ZU;2-O
Abstract
Material and gas sensing properties of tin oxide thin-films are descri bed in this paper. The thin-films are prepared by r.f. sputtering usin g tin dioxide target and tin metal target under different sputtering c onditions. Rutherford back scattering (RES) was used to analyze the co ncentrations of Sn4+ and Sn2+ species in the sputtered thin-films. The gas sensing properties of the thin-films are interpreted according to the concentration of Sn4+ and Sn2+ and a mutual transition model. (C) 1997 Elsevier Science S.V.