PLANAR INTERDIGITATED ELECTROLYTE-CONDUCTIVITY SENSORS ON AN INSULATING SUBSTRATE COVERED WITH TA2O5

Authors
OLTHUIS W SPRENKELS AJ BOMER JG BERGVELD P
Citation
W. Olthuis et al., PLANAR INTERDIGITATED ELECTROLYTE-CONDUCTIVITY SENSORS ON AN INSULATING SUBSTRATE COVERED WITH TA2O5, Sensors and actuators. B, Chemical, 43(1-3), 1997, pp. 211-216
Citations number
4
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
43
Issue
1-3
Year of publication
1997
Pages
211 - 216
Database
ISI
SICI code
0925-4005(1997)43:1-3<211:PIESOA>2.0.ZU;2-Q
Abstract
Interdigitated electrolyte-conductivity sensors with an added top laye r of insulating Ta2O5 have been realized. The electrode-substrate stru cture under the Ta2O5 film has been planarized in order to obtain a to tally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten. (C) 1997 Elsevier Science S.A.