We have studied the dewetting of thin polymer films (polystyrene) on t
op of different silicon substrates. With diffuse X-ray scattering and
scanning-force microscopy a high in-plane resolution was achieved. Bes
ides the well-known mesoscopic dewetting structures of drops with diam
eters in the range of several micrometers we detect a further morpholo
gical feature. Depending on the thickness of the native silicon oxide
layer, inside the dewetted areas small dimples are formed. This nano-d
ewetting structure can be understood as the result of the dewetting of
a remaining ultra-thin film and is compared with theoretical predicti
ons of spinodal decomposition. This observation of another length scal
e provides some new aspects on the molecular mechanism of polymer dewe
tting.