J. Redmond et P. Barney, VIBRATION CONTROL OF STIFF BEAMS AND PLATES USING STRUCTURALLY INTEGRATED PZT STACK ACTUATORS, Journal of intelligent material systems and structures, 8(6), 1997, pp. 525-535
An actuation technique suitable for controlling bending vibrations in
thick beams and plates is described. This work is motivated by vibrati
on problems encountered in manufacturing that require greater control
authority than can be obtained using surface mounted PZT patches or PV
DF films. Instead, PZT stack actuators mounted in material cutouts are
used to induce bending moments in the host structure. Experimental re
sults are provided for the case of a cantilevered bar and a lithograph
y platen used in the manufacture of integrated circuits. Good coupling
between the extensional motion of the actuators and the bending defor
mation of the host structures is illustrated, and significant increase
s in first mode damping are achieved in both examples using a positive
position feedback compensator.