COMPUTER-SIMULATION OF THE GROWTH OF HETEROSTRUCTURE SYSTEMS

We have investigated the growth of heterostructures with high lattice mismatch and the growth of quantum wires on the top of ridges and thro ugh shadowing masks. Simulations are performed within a Monte Carlo sc heme using tetrahedral lattice structure of semiconductor materials. I t is shown that results of different simulations present similarities that we attribute to the primary role of kinetic effects as the drivin g force during epitaxial growth. The formation of 3D islands showing ( 111) facets, or (111) side walls when depositing through a shadowing m ask, has been observed. The facets are of better quality than the top (001) surface because of the higher mobility of atoms on these facets. (C) 1997 Elsevier Science Ltd.