MECHANICAL STRESSES IN FILMS OF DOPED SIL ICATE-GLASSES

Authors
KOMAROV FF LABUDA AA SIDERKO AA SAPUN IP
Citation
Ff. Komarov et al., MECHANICAL STRESSES IN FILMS OF DOPED SIL ICATE-GLASSES, Doklady Akademii nauk BSSR, 41(5), 1997, pp. 114-117
Citations number
12
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Doklady Akademii nauk BSSR → ACNP
ISSN journal
0002354X
Volume
41
Issue
5
Year of publication
1997
Pages
114 - 117
Database
ISI
SICI code
0002-354X(1997)41:5<114:MSIFOD>2.0.ZU;2-H
Abstract
The results of experimental investigation of the mechanical stresses i n the films of doped silicate glasses used as planarization interlayer isolation for the integrated-circuit production have been presented. A complex relationship between this parameter and the dopand concentra tion, deposition temperature, thermalannealing mode has been found.