T. Umemoto et al., PHYSICAL-PROPERTIES OF COFE IRMN SPIN-VALVES PREPARED USING ION-BEAM SPUTTERING WITH AN XE-H-2 MIXTURE GAS/, JPN J A P 1, 36(11), 1997, pp. 6746-6748
Co90Fe10/Cu/Co90Fe10/Ir25Mn75 spin-valves with a Ta seed layer were pr
epared by ion beam sputtering. Improvements in magnetoresistive (MR) a
nd magnetic properties were obtained by adding H-2 to Xe sputtering ga
s. Specifically, the coercivity in the free Co90Fe10 layer considerabl
y decreased as the Ha how rate was increased. Furthermore, exchange co
upling between the Ir25Mn75 and pinned Co90Fe10 layers became stronger
in the preparation under the higher H-2 flow rate. X-ray diffraction,
transmission electron microscopy, and secondary ion mass spectroscopy
observations suggest that micro-crystallization of each layer is resp
onsible for improving the MR and magnetic properties.