A microhardness analysis of amorphous diamond-like carbon (a:DLC) film
s, synthesized from methane by the RF glow discharge method was carrie
d out. It was performed using a standard tester PMT-3, which consisted
of a flat field microscope and a diamond stylus probe. Vickers indent
ation measurements were taken using constant loads of 10 g, 20 g, 30 g
, 50 g and 60 g in a continuous pressure. It was shown that the microh
ardness of the a:DLC thin films strongly depended on the methodologica
l principles of the measurement technique and the instrumentation used
. An iteration method was applied to choose the correct load value. Ea
ch load was accompanied by a metallographical control of the indentor
stamps quality. Best results were obtained for 10 g, 20 g and 30 g loa
ds. The analysis is based on the empirical approach((1-13)) and the ca
vity model of the indentation hardness.((14))