A NOVEL SILICON SENSING ELEMENT FOR HIGH-NATURAL-FREQUENCY, LOW-RANGEDYNAMOMETRICAL SENSORS

Authors
JIN WL MOTE CD
Citation
Wl. Jin et Cd. Mote, A NOVEL SILICON SENSING ELEMENT FOR HIGH-NATURAL-FREQUENCY, LOW-RANGEDYNAMOMETRICAL SENSORS, Sensors and actuators. A, Physical, 64(2), 1998, pp. 165-171
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
64
Issue
2
Year of publication
1998
Pages
165 - 171
Database
ISI
SICI code
0924-4247(1998)64:2<165:ANSSEF>2.0.ZU;2-2
Abstract
A novel silicon sensing element is developed using microfabrication te chnology. The sensitivity of a sensor incorporating the sensing elemen t can be increased by an order of magnitude while its stiffness and na tural frequencies are maintained. A prototype force sensor is develope d to verify the effectiveness of the method. Satisfactory agreements b etween the predicted and measured sensitivites are observed, and high resolution (20 mu N) and high fundamental frequency (2800 Hz) are also achieved. (C) 1998 Elsevier Science S.A.