The performance of a 0.45 J KrF excimer laser with an unstable cavity
using a phase-unifying mirror as an output coupler is described. The o
utput beam having a cross section of 2.4 x 1.2 cm(2) exhibits a smooth
far field profile with 86.5% of the total near field energy contained
within a far-field full angle theta less than or equal to 0.05 mrad.
The measurements for determining the beam quality factor M-2 and the b
eam angular stability are also reported. (C) 1997 American Institute o
f Physics. [S0003-6951(97)01552-0].