Atoms and molecules on solid surfaces start to move at relatively low
temperature. The dynamic behavior of atoms and molecules is responsibl
e for crystal shape changes, crystal growth and thin film epitaxy, sur
face enhanced chemical reactions and many other surface;phenomena wher
e transport of atoms and molecules is involved. Identification of elem
entary atomic processes in the dynamic behavior, and finding their mec
hanisms and energetics are the key to understand these surface phenome
na at the fundamental level. Using atomic resolution microscopy, it is
now possible to trace the motion of single atoms and molecules on sol
id surfaces from which elementary atomic processes can be identified a
nd studied. Here, we discuss a few of our recent results at metal and
semiconductor surfaces where novel mechanisms of atomic and molecular
movements have been found. We also discuss how our result can be used
to explain different growth modes existing in epitaxy.