The kinetics of structural relaxation in hydrogenated amorphous silico
n (a-Si:H) deposited by various methods is investigated by differentia
l scanning calorimetry. The experimental results are used to analyze t
he nature of the metastable states in a-Si:H and to investigate the re
lationship between structural relaxation and light-induced metastabili
ty (the Staebler-Wronski effect). (C) 1997 American Institute of Physi
cs. [S1063-7826(97)02311-9].