EXCELLENT CRYSTALLOGRAPHIC AND PERPENDICULAR MAGNETIC CHARACTERISTICSOF BA FERRITE FILMS DEPOSITED BY GAS-MIXTURE OF AR, XE AND O-2

Ba ferrite films with good c-axis orientation and magnetic characteris tics were deposited on ZnO underlayer at substrate temperature T-s fro m 475 to 600 degrees C in the gas mixture of Xe (0.10 Pa), Ar (0.08 Pa ) and O-2 (0.02 Pa) using the facing targets sputtering apparatus. The film deposited at T-s of 600 degrees C was composed of BaM and spinel ferrite crystallites and exhibited saturation magnetization 4 pi M-s, of 5.1 kG and perpendicular anisotropy constant K-u1,, of 4.23 x 10(5 ) J m(-3) which were larger than those of bulk BaM ferrite of 4.8 kG a nd 3.30 x 10(5) J m(-3), respectively. c-axis orientation was observed even for the film deposited at low T-s of 475 degrees C and its value s of 4 pi M-s,, perpendicular coercivity H-c and in-plane one H-c para llel to were 4.7 kG, 2.38 kOe and 0.19 kOe, respectively.