EFFECTS OF A LIQUID-NITROGEN SHROUD ON THE DEPOSITING OF SOFT-MAGNETIC FILMS

Authors
NAKASHIO E WATANABE I MURAOKA H NAKAMURA Y
Citation
E. Nakashio et al., EFFECTS OF A LIQUID-NITROGEN SHROUD ON THE DEPOSITING OF SOFT-MAGNETIC FILMS, Journal of magnetism and magnetic materials, 176(1), 1997, pp. 46-50
Citations number
6
Journal title
Journal of magnetism and magnetic materials → ACNP
ISSN journal
03048853
Volume
176
Issue
1
Year of publication
1997
Pages
46 - 50
Database
ISI
SICI code
0304-8853(1997)176:1<46:EOALSO>2.0.ZU;2-V
Abstract
The effect of a liquid-nitrogen shroud on the deposition of Ni-Fe-Nb s oft magnetic layer for a perpendicular magnetic recording medium is in vestigated. The shroud has the advantage of removing water from the sp uttering atmosphere, and also enables quick pumping. Consequently, dep osited films show both good crystallinity and a smooth surface, making them suitable for the underlayer of the recording medium.