DIAMOND-LIKE CARBON-FILMS DEPOSITED WITHOUT DEPOSITION PARTICLES OF LARGE INCIDENCE ANGLES BY SPUTTERING

Authors
HOSHI Y SUZUKI E OSAKA T
Citation
Y. Hoshi et al., DIAMOND-LIKE CARBON-FILMS DEPOSITED WITHOUT DEPOSITION PARTICLES OF LARGE INCIDENCE ANGLES BY SPUTTERING, Journal of magnetism and magnetic materials, 176(1), 1997, pp. 51-55
Citations number
15
Journal title
Journal of magnetism and magnetic materials → ACNP
ISSN journal
03048853
Volume
176
Issue
1
Year of publication
1997
Pages
51 - 55
Database
ISI
SICI code
0304-8853(1997)176:1<51:DCDWDP>2.0.ZU;2-9
Abstract
Deposition of diamond-like carbon (DLC) films at liquid nitrogen tempe rature (77 K) under the control of the angular distribution of deposit ing particles was attempted using a DC facing target sputtering system . The film deposited at 77 K, the liquid-nitrogen temperature, has a m uch higher density and higher hardness than the him deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the f ilm.