IMPROVEMENT OF AVERAGE LASER POWER AND BEAM DIVERGENCE OF A HIGH PULSE REPETITION FREQUENCY EXCIMER-LASER

Authors
UTEZA O DELAPORTE P FONTAINE B FORESTIER B SENTIS M TASSY I TRUONG JP
Citation
O. Uteza et al., IMPROVEMENT OF AVERAGE LASER POWER AND BEAM DIVERGENCE OF A HIGH PULSE REPETITION FREQUENCY EXCIMER-LASER, Applied physics. B, Lasers and optics, 66(1), 1998, pp. 31-37
Citations number
28
Categorie Soggetti
Physics, Applied",Optics
Journal title
Applied physics. B, Lasers and optics → ACNP
ISSN journal
09462171
Volume
66
Issue
1
Year of publication
1998
Pages
31 - 37
Database
ISI
SICI code
0946-2171(1998)66:1<31:IOALPA>2.0.ZU;2-F
Abstract
We demonstrate that the insertion of ceramic acoustic dampers within a n excimer laser cavity produces a large reduction in the amplitude of the residual pressure fluctuations, hence allowing a strong improvemen t of average laser power and beam divergence at high pulse repetition frequency. Moreover, this technological solution is easy to implement and economical.