OPERATIONAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN TORSIONAL RESONATOR WITH 2 DEGREES OF FREEDOM

Authors
USUDA T
Citation
T. Usuda, OPERATIONAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN TORSIONAL RESONATOR WITH 2 DEGREES OF FREEDOM, Sensors and actuators. A, Physical, 64(3), 1998, pp. 255-257
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
64
Issue
3
Year of publication
1998
Pages
255 - 257
Database
ISI
SICI code
0924-4247(1998)64:3<255:OCOEDT>2.0.ZU;2-R
Abstract
Actuators based on the electrostatic principle are some of the most im portant devices in microsystems. However it is difficult to combine lo w voltage drive with large amplitude. In this paper, the operational c haracteristics of an electrostatically driven torsional resonator with two degrees of freedom (TDF) are theoretically investigated. The adva ntage of the resonator with TDF for obtaining low voltage drive and la rge amplitude is indicated. (C) 1998 Elsevier Science S.A.