M AND S - MODELING A BETTER FAB

Authors
GOOSSENS R LEON P
Citation
R. Goossens et P. Leon, M AND S - MODELING A BETTER FAB, Solid state technology, 41(1), 1998, pp. 80-80
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
41
Issue
1
Year of publication
1998
Pages
80 - 80
Database
ISI
SICI code
0038-111X(1998)41:1<80:MAS-MA>2.0.ZU;2-S