CONTRIBUTION OF NUCLEAR ANALYTICAL TECHNIQUES IN OPTIMIZATION OF LI-GE-O THIN-FILMS

Authors
ROUX F BAUD G BLONDIAUX G BESSE JP CAUDRON E JACQUET M
Citation
F. Roux et al., CONTRIBUTION OF NUCLEAR ANALYTICAL TECHNIQUES IN OPTIMIZATION OF LI-GE-O THIN-FILMS, Solid state ionics, 104(3-4), 1997, pp. 177-181
Citations number
26
Journal title
Solid state ionics → ACNP
ISSN journal
01672738
Volume
104
Issue
3-4
Year of publication
1997
Pages
177 - 181
Database
ISI
SICI code
0167-2738(1997)104:3-4<177:CONATI>2.0.ZU;2-K
Abstract
Compositions of Li-Ge-O electrolyte thin films (0.1 to 3 mu m thick) d eposited by r.f. sputtering were determined by Rutherford backscatteri ng spectrometry (RBS) and proton induced gamma-ray emission spectrosco py (PIGE). The aim of this paper is to illustrate the interest of thes e techniques in composition determination of thin films. The use of th ese techniques allows the optimization of Li-Ge-O thin films compositi on giving the highest ionic conductivity.