STUDY ON THE GAS-PHASE HBR-CATALYZED REACTION BETWEEN UF6 AND SIH4 ATROOM-TEMPERATURE

The gas phase HBr-catalyzed reaction UF6 + SiH4 at room temperature an d its kinetic mechanism were investigated. It was found that this cata lyzed reaction followed the first-order kinetics, and the reaction rat e constant was proportional to the concentration of catalyst HBr, e.g. the measured rate constants were 0.75 x 10(-3), 1.58 x 10(-3) and 3.0 0 x 10(-3) s(-1) at the respective concentrations of HBr at 0.5 x 133. 3, 1.0 x 133.3 and 2.0 x 133.3 Pa. The proposed kinetic mechanism of t he HBr-catalyzed reaction was in good accordance with the measured res ults. (C) 1998 Elsevier Science B.V.